Inventor
LOW CHUN HUI
MY11 patents
⚠️ This page may combine multiple inventors who share the name “LOW CHUN HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
8 patentsUS6228727B1May 8, 2001
Method to form shallow trench isolations with rounded corners and reduced trench oxide recess
CHARTERED SEMICONDUCTOR MFG142 citations97
US6350661B2Feb 26, 2002
Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts
CHARTERED SEMICONDUCTOR MFG49 citations95
US6265302B1Jul 24, 2001
Partially recessed shallow trench isolation method for fabricating borderless contacts
CHARTERED SEMICONDUCTOR MFG77 citations95
US6297126B1Oct 2, 2001
Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts
CHARTERED SEMICONDUCTOR MFG20 citations92
US6271133B1Aug 7, 2001
Optimized Co/Ti-salicide scheme for shallow junction deep sub-micron device fabrication
CHARTERED SEMICONDUCTOR MFG36 citations92
US7045455B2May 16, 2006
Via electromigration improvement by changing the via bottom geometric profile
CHARTERED SEMICONDUCTOR MFG17 citations91
US7781895B2Aug 24, 2010
Via electromigration improvement by changing the via bottom geometric profile
CHARTERED SEMICONDUCTOR MFG1 citations61
US7691739B2Apr 6, 2010
Via electromigration improvement by changing the via bottom geometric profile
CHARTERED SEMICONDUCTOR MFG0 citations51