Inventor
HAYASHI TERUYUKI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI TERUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS6331890B1Dec 18, 2001
Thickness measuring apparatus, substrate processing method, and substrate processing apparatus
TOKYO ELECTRON LTD66 citations95
US6344387B1Feb 5, 2002
Wafer boat and film formation method
TOKYO ELECTRON LTD28 citations90
US7993458B2Aug 9, 2011
Vacuum processing apparatus and method
TOKYO ELECTRON LTD17 citations84
US7208428B2Apr 24, 2007
Method and apparatus for treating article to be treated
TOKYO ELECTRON LTD17 citations82
US7420118B2Sep 2, 2008
Electric wire and cable with coating/covering of polyvinyl chloride family resin composition
TOKYO ELECTRON LTD5 citations73
US6403498B1Jun 11, 2002
Method and device for treating substrate
TOKYO ELECTRON LTD4 citations62
US8040504B2Oct 18, 2011
Defect inspecting method and defect inspecting apparatus
TOKYO ELECTRON LTD4 citations61
US7508518B2Mar 24, 2009
Particle measuring method and particle measuring apparatus
TOKYO ELECTRON LTD2 citations61
US8674397B2Mar 18, 2014
Sealing film forming method, sealing film forming device, and light-emitting device
TOKYO ELECTRON LTD0 citations52
US8008211B2Aug 30, 2011
Pattern forming method, semiconductor device manufacturing apparatus and storage medium
TOKYO ELECTRON LTD1 citations51
US7946152B2May 24, 2011
Apparatus and method for measuring the concentration of organic gas
TOKYO ELECTRON LTD1 citations51
US7923680B2Apr 12, 2011
Analysis method and analysis apparatus
TOKYO ELECTRON LTD0 citations47
US10615378B2Apr 7, 2020
Reduced-pressure drying apparatus
TOKYO ELECTRON LTD0 citations38
US8021623B2Sep 20, 2011
Examination method and examination assistant device for quartz product of semiconductor processing apparatus
TOKYO ELECTRON LTD0 citations37
NAT INST OF ADVANCED IND SCIEN
4 patentsUS6774200B2Aug 10, 2004
Silsesquioxane polymer molding and method of preparing same
NAT INST OF ADVANCED IND SCIEN6 citations63
US6949621B2Sep 27, 2005
Polymer containing 9-oxo-9-phosphafluorene-2,7-diyl skeleton in backbone and process for producing the same
NAT INST OF ADVANCED IND SCIEN2 citations60
US6753401B1Jun 22, 2004
Silcon-containing polymers
NAT INST OF ADVANCED IND SCIEN5 citations60
US6787241B2Sep 7, 2004
Film obtained from silsesquioxane polymer and method of preparing same
NAT INST OF ADVANCED IND SCIEN0 citations42
AGENCY IND SCIENCE TECHN
3 patentsUS4370258AJan 25, 1983
Catalyst system for hydroformylation of olefins
AGENCY IND SCIENCE TECHN19 citations79
US5151538ASep 29, 1992
Organosilicon compound and process for producing organosilicon compound
AGENCY IND SCIENCE TECHN7 citations74
US4229381AOct 21, 1980
Process for preparation of aldehydes
AGENCY IND SCIENCE TECHN15 citations71