Inventor
TSENG MING KUIE
US3 patents
Patents
3 patentsUS6450868B1Sep 17, 2002
Carrier head with multi-part flexible membrane
APPLIED MATERIALS INC67 citations95
US6979250B2Dec 27, 2005
Carrier head with flexible membrane to provide controllable pressure and loading area
APPLIED MATERIALS INC33 citations91
US6776694B2Aug 17, 2004
Methods for carrier head with multi-part flexible membrane
APPLIED MATERIALS INC34 citations91