Inventor
TSUGANE HIDEAKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TSUGANE HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6372554B1Apr 16, 2002
Semiconductor integrated circuit device and method for production of the same
HITACHI LTD135 citations97
US5904556AMay 18, 1999
Method for making semiconductor integrated circuit device having interconnection structure using tungsten film
HITACHI LTD63 citations95
US6583049B2Jun 24, 2003
Semiconductor integrated circuit device and method for making the same
HITACHI LTD13 citations92
US6300237B1Oct 9, 2001
Semiconductor integrated circuit device and method for making the same
HITACHI LTD7 citations73
US6538329B2Mar 25, 2003
Semiconductor integrated circuit device and method for making the same
HITACHI LTD0 citations51
RENESAS TECH CORP
3 patentsUS6780757B2Aug 24, 2004
Semiconductor integrated circuit device and method for making the same
RENESAS TECH CORP17 citations92
US6764945B2Jul 20, 2004
Method of manufacturing a multilayer metallization structure with non-directional sputtering method
RENESAS TECH CORP13 citations82
US7566662B2Jul 28, 2009
Method of dry cleaning silicon surface prior to forming self-aligned nickel silicide layer
RENESAS TECH CORP4 citations61