Inventor
YOSHIURA YOSHIAKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIURA YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS5061985AOct 29, 1991
Semiconductor integrated circuit device and process for producing the same
HITACHI LTD164 citations96
US5904556AMay 18, 1999
Method for making semiconductor integrated circuit device having interconnection structure using tungsten film
HITACHI LTD63 citations95
US6583049B2Jun 24, 2003
Semiconductor integrated circuit device and method for making the same
HITACHI LTD13 citations92
US4782037ANov 1, 1988
Process of fabricating a semiconductor insulated circuit device having a phosphosilicate glass insulating film
HITACHI LTD49 citations90
US6300237B1Oct 9, 2001
Semiconductor integrated circuit device and method for making the same
HITACHI LTD7 citations73
US6538329B2Mar 25, 2003
Semiconductor integrated circuit device and method for making the same
HITACHI LTD0 citations51