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Inventor

SKOCZYLAS WALTER

US5 patents
⚠️ This page may combine multiple inventors who share the name “SKOCZYLAS WALTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FEI CO

3 patents
US6797953B2Sep 28, 2004

Electron beam system using multiple electron beams

FEI CO38 citations91
US6710338B2Mar 23, 2004

Focused ion beam system

FEI CO25 citations84
US9530625B2Dec 27, 2016

Method for attachment of an electrode into an inductively-coupled plasma

FEI CO0 citations48

KELLOGG SEAN

1 patent
US9053895B2Jun 9, 2015

System for attachment of an electrode into a plasma source

KELLOGG SEAN0 citations49

ZHANG SHOUYIN

1 patent
US9196451B2Nov 24, 2015

Plasma source for charged particle beam system

ZHANG SHOUYIN0 citations39