P

Inventor

TILLMANN ANDREAS

DE7 patents
⚠️ This page may combine multiple inventors who share the name “TILLMANN ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ALANTUM EUROPE GMBH

3 patents
US11883811B2Jan 30, 2024

Catalyst material and method of manufacturing the same

ALANTUM EUROPE GMBH2 citations67
US11660582B2May 30, 2023

Method for producing a pellet, pellet, catalyst charge, and static mixer

ALANTUM EUROPE GMBH2 citations62
US12285748B2Apr 29, 2025

Catalyst material and method of manufacturing the same

ALANTUM EUROPE GMBH0 citations57

AST ELEKRONIK GMBH

1 patent
US5628564AMay 13, 1997

Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems

AST ELEKRONIK GMBH98 citations94

AST ELEKRONIK

1 patent
US5580830ADec 3, 1996

Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus

AST ELEKRONIK24 citations87

MATTSON TECH INC

1 patent
US7037797B1May 2, 2006

Localized heating and cooling of substrates

MATTSON TECH INC27 citations86

STEAG RTP SYSTEMS GMBH

1 patent
US7041610B1May 9, 2006

Method and apparatus for the thermal treatment of substrates

STEAG RTP SYSTEMS GMBH5 citations57