Inventor

KREISER UWE

DE2 patents

Patents

2 patents

US6953338B2Oct 11, 2005

Device for thermal treatment of substrates

STEAG RTP SYSTEMS GMBH23 citations86

US7041610B1May 9, 2006

Method and apparatus for the thermal treatment of substrates

STEAG RTP SYSTEMS GMBH5 citations57