Inventor
THUREN ANDERS
SE7 patents
Patents
7 patentsUS6883158B1Apr 19, 2005
Method for error reduction in lithography
MICRONIC LASER SYSTEMS AB130 citations96
US6717097B1Apr 6, 2004
Data path for high performance pattern generator
MICRONIC LASER SYSTEMS AB69 citations95
US7590966B2Sep 15, 2009
Data path for high performance pattern generator
MICRONIC LASER SYSTEMS AB23 citations92
US5635976AJun 3, 1997
Method and apparatus for the production of a structure by focused laser radiation on a photosensitively coated substrate
MICRONIC LASER SYSTEMS AB79 citations90
US7088468B1Aug 8, 2006
Data-conversion method for a multibeam laser writer for very complex microlithographic patterns
MICRONIC LASER SYSTEMS AB18 citations82
US6624878B1Sep 23, 2003
Laser writer
MICRONIC LASER SYSTEMS AB14 citations81
US7167231B2Jan 23, 2007
Method and apparatus for printing large data flows
MICRONIC LASER SYSTEMS AB7 citations71