Inventor

SU YAJUAN

CN3 patents

Patents

3 patents

US12222641B2Feb 11, 2025

Method and device for optimizing mask parameters

INST OF MICROELECTRONICS CAS0 citations56

US12198930B2Jan 14, 2025

Method for manufacturing semiconductor device

INST OF MICROELECTRONICS CAS0 citations56

US10141408B2Nov 27, 2018

Method and arrangement for reducing contact resistance of two-dimensional crystal material

INST OF MICROELECTRONICS CAS0 citations47