Inventor
GALLAGHER EMILY F
US4 patents
Patents
4 patentsUS7537114B2May 26, 2009
System and method for storing and transporting photomasks in fluid
IBM6 citations59
US7355680B2Apr 8, 2008
Method for adjusting lithographic mask flatness using thermally induced pellicle stress
IBM2 citations59
US7826038B2Nov 2, 2010
Method for adjusting lithographic mask flatness using thermally induced pellicle stress
IBM2 citations56
US7110195B2Sep 19, 2006
Monolithic hard pellicle
IBM1 citations45