Inventor
HELLWIG LANCE G
US10 patents
⚠️ This page may combine multiple inventors who share the name “HELLWIG LANCE G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMC ELECTRONIC MATERIALS
6 patentsUS5518549AMay 21, 1996
Susceptor and baffle therefor
MEMC ELECTRONIC MATERIALS560 citations98
US5789309AAug 4, 1998
Method and system for monocrystalline epitaxial deposition
MEMC ELECTRONIC MATERIALS52 citations92
US8042697B2Oct 25, 2011
Low thermal mass semiconductor wafer support
MEMC ELECTRONIC MATERIALS16 citations90
US7878562B2Feb 1, 2011
Semiconductor wafer carrier blade
MEMC ELECTRONIC MATERIALS22 citations90
US5843234ADec 1, 1998
Method and apparatus for aiming a barrel reactor nozzle
MEMC ELECTRONIC MATERIALS31 citations86
US7462246B2Dec 9, 2008
Modified susceptor for barrel reactor
MEMC ELECTRONIC MATERIALS14 citations83