Inventor
CHIU YI-WEI
TW133 patents
⚠️ This page may combine multiple inventors who share the name “CHIU YI-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
48 patentsUS9812363B1Nov 7, 2017
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD237 citations99
US10083863B1Sep 25, 2018
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD77 citations97
US10170555B1Jan 1, 2019
Intermetallic doping film with diffusion in source/drain
TAIWAN SEMICONDUCTOR MFG CO LTD19 citations94
US10141225B2Nov 27, 2018
Metal gates of transistors having reduced resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations94
US11088025B2Aug 10, 2021
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations93
US10510596B2Dec 17, 2019
Metal gates of transistors having reduced resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations92
US9881834B1Jan 30, 2018
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations91
US9865697B1Jan 9, 2018
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD20 citations91
US11430694B2Aug 30, 2022
Metal gates of transistors having reduced resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations84
US11075279B2Jul 27, 2021
Metal gate and contact plug design and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US11043251B2Jun 22, 2021
Magnetic tunnel junction device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations84
US10985061B2Apr 20, 2021
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10825727B2Nov 3, 2020
Metal gates of transistors having reduced resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10522408B2Dec 31, 2019
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10510875B2Dec 17, 2019
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10510516B2Dec 17, 2019
Moving focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10483165B2Nov 19, 2019
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10269917B2Apr 23, 2019
Method of forming a FinFET with work function tuning layers having stair-step increment sidewalls
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10186456B2Jan 22, 2019
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10163715B2Dec 25, 2018
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10121873B2Nov 6, 2018
Metal gate and contact plug design and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9905456B1Feb 27, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10679896B2Jun 9, 2020
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10679950B2Jun 9, 2020
Methods of forming recesses in substrates by etching dummy Fins
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10510598B2Dec 17, 2019
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10504738B2Dec 10, 2019
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10297555B2May 21, 2019
Integrated circuit structure having crown-shaped semiconductor strips and recesses in the substrate from etched dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations83
US9837539B1Dec 5, 2017
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10854603B2Dec 1, 2020
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations82
US10079178B1Sep 18, 2018
Formation method of semiconductor device structure using multilayer resist layer
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations82
US10037918B2Jul 31, 2018
Contact structure and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US11545562B2Jan 3, 2023
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11437484B2Sep 6, 2022
Gate structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11171003B2Nov 9, 2021
Doping through diffusion and epitaxy profile shaping
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10998259B2May 4, 2021
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10910223B2Feb 2, 2021
Doping through diffusion and epitaxy profile shaping
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10763162B2Sep 1, 2020
Interconnect structure of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10629480B2Apr 21, 2020
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10304729B2May 28, 2019
Method of forming interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12080547B2Sep 3, 2024
Interconnect system with improved low-K dielectrics
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11776847B2Oct 3, 2023
Contact structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10566232B2Feb 18, 2020
Post-etch treatment of an electrically conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10163650B2Dec 25, 2018
System and method for selective nitride etch
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10153373B2Dec 11, 2018
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12094877B2Sep 17, 2024
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11600713B2Mar 7, 2023
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11569125B2Jan 31, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11195750B2Dec 7, 2021
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
UNIV NAT CHIAO TUNG
1 patentJOU SHYH-JYE
1 patentShowing the top 50 of 133 patents by PatentIndex Score.