Inventor
CHIU YIH SONG
TW4 patents
⚠️ This page may combine multiple inventors who share the name “CHIU YIH SONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS7064085B2Jun 20, 2006
Feed forward spacer width control in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG11 citations79
US6972241B2Dec 6, 2005
Method of forming an STI feature to avoid electrical charge leakage
TAIWAN SEMICONDUCTOR MFG8 citations68
US8049213B2Nov 1, 2011
Feature dimension measurement
TAIWAN SEMICONDUCTOR MFG0 citations51