Inventor
BOESSER HANS-ARTUR
DE9 patents
⚠️ This page may combine multiple inventors who share the name “BOESSER HANS-ARTUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VISTEC SEMICONDUCTOR SYS GMBH
6 patentsUS7450246B2Nov 11, 2008
Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
VISTEC SEMICONDUCTOR SYS GMBH8 citations70
US7551296B2Jun 23, 2009
Method for determining the focal position of at least two edges of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH5 citations59
US7978340B2Jul 12, 2011
System and method for determining positions of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH1 citations49
US7982950B2Jul 19, 2011
Measuring system for structures on a substrate for semiconductor manufacture
VISTEC SEMICONDUCTOR SYS GMBH1 citations43
US7961334B2Jun 14, 2011
Coordinate measuring machine for measuring structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH0 citations39
US8351049B2Jan 8, 2013
Interferometric device for position measurement and coordinate measuring machine
VISTEC SEMICONDUCTOR SYS GMBH0 citations30