Inventor
GENETTI DAMON
US9 patents
⚠️ This page may combine multiple inventors who share the name “GENETTI DAMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS6405101B1Jun 11, 2002
Wafer centering system and method
NOVELLUS SYSTEMS INC134 citations96
US8033769B2Oct 11, 2011
Loadlock designs and methods for using same
NOVELLUS SYSTEMS INC42 citations91
US6934606B1Aug 23, 2005
Automatic calibration of a wafer-handling robot
NOVELLUS SYSTEMS INC89 citations91
US9496159B2Nov 15, 2016
Wafer position correction with a dual, side-by-side wafer transfer robot
NOVELLUS SYSTEMS INC1 citations46
GAGE CHRIS
3 patentsUS8060252B2Nov 15, 2011
High throughput method of in transit wafer position correction in system using multiple robots
GAGE CHRIS571 citations96
US8489237B2Jul 16, 2013
High throughput method of in transit wafer position correction in a system using multiple robots
GAGE CHRIS12 citations82
US8491248B2Jul 23, 2013
Loadlock designs and methods for using same
GAGE CHRIS3 citations60