Inventor

THEILER THOMAS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “THEILER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG AST

1 patent

US5965047AOct 12, 1999

Rapid thermal processing (RTP) system with rotating substrate

STEAG AST51 citations88

MATTSON TECH INC

1 patent

US7704898B2Apr 27, 2010

Method for the thermal treatment of disk-shaped substrates

MATTSON TECH INC15 citations79

LERCH WILFRIED

1 patent

US8716153B2May 6, 2014

Device and method for producing dielectric layers in microwave plasma

LERCH WILFRIED3 citations51