Inventor
HE QIYANG
CN16 patents
⚠️ This page may combine multiple inventors who share the name “HE QIYANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HE QIYANG
4 patentsUS8952297B2Feb 10, 2015
Reaction apparatus for processing wafer, electrostatic chuck and wafer temperature control method
HE QIYANG13 citations82
US8450167B2May 28, 2013
Method of fabricating semiconductor devices
HE QIYANG5 citations71
US8673707B2Mar 18, 2014
Method for forming metal gate
HE QIYANG3 citations61
US8741744B2Jun 3, 2014
Method of forming a gate pattern and a semiconductor device
HE QIYANG0 citations40
ZHANG YIYING
4 patentsUS8450166B2May 28, 2013
Method of fabricating semiconductor devices
ZHANG YIYING7 citations82
US9349862B2May 24, 2016
Method of fabricating semiconductor devices
ZHANG YIYING2 citations60
US8507379B2Aug 13, 2013
Semiconductor device and manufacturing method thereof
ZHANG YIYING0 citations50
US8759179B2Jun 24, 2014
Method of forming gate pattern and semiconductor device
ZHANG YIYING0 citations39