Inventor

VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS

NL23 patents

⚠️ This page may combine multiple inventors who share the name “VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS

ASML NETHERLANDS BV

Patterning device cooling apparatus

Lithographic apparatus and device manufacturing method

Patterning device cooling apparatus

Patterning device cooling apparatus

Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method

Method and apparatus for predicting aberrations in a projection system

Lithographic method

Multi-channel light source for projection optics heating

Lithographic method

Patterning device cooling apparatus

Lithographic method

Patterning device cooling systems in a lithographic apparatus

Lithographic apparatus with improved patterning performance

Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus

Gas flow optimization in reticle stage environment

ASML HOLDING NV

Reticle cooling by non-uniform gas flow

Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor

VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS

Fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method

Immersion lithographic apparatus and device manufacturing method

NIENHUYS HAN-KWANG

Lithographic apparatus and device manufacturing method

GOSEN JEROEN GERARD

Lithographic apparatus and a device manufacturing method

LAFARRE RAYMOND WILHELMUS LOUIS

Lithographic apparatus, coverplate and device manufacturing method

RIEPEN MICHEL

Fluid handling structure, lithographic apparatus and device manufacturing method