Inventor
FAN CHUN-HSIANG
TW38 patents
⚠️ This page may combine multiple inventors who share the name “FAN CHUN-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
30 patentsUS10199502B2Feb 5, 2019
Structure of S/D contact and method of making same
TAIWAN SEMICONDUCTOR MFG CO LTD145 citations99
US9543419B1Jan 10, 2017
FinFET structures and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD25 citations94
US9536962B1Jan 3, 2017
Source/drain regions for high electron mobility transistors (HEMT) and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US9620633B2Apr 11, 2017
Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations83
US10446669B2Oct 15, 2019
Source and drain surface treatment for multi-gate field effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10164116B2Dec 25, 2018
FETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9818878B2Nov 14, 2017
FETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9559206B2Jan 31, 2017
FinFETs with necking in the fins
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11158726B2Oct 26, 2021
Controlling fin-thinning through feedback
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10930784B2Feb 23, 2021
FETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12176422B2Dec 24, 2024
Controlling fin-thinning through feedback
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923437B2Mar 5, 2024
Controlling fin-thinning through feedback
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11670717B2Jun 6, 2023
Structure of S/D contact and method of making same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11133200B2Sep 28, 2021
Substrate vapor drying apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12439643B2Oct 7, 2025
Fin shape modification
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12191380B2Jan 7, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11424347B2Aug 23, 2022
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12575121B2Mar 10, 2026
Reducing fin wriggling in fin-thinning process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11823945B2Nov 21, 2023
Method for cleaning semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10868149B2Dec 15, 2020
Source and drain surface treatment for multi-gate field effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10693009B2Jun 23, 2020
Structure of S/D contact and method of making same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9953878B2Apr 24, 2018
Method of forming a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9929248B2Mar 27, 2018
Source/drain regions for high electron mobility transistors (HEMT) and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9887274B2Feb 6, 2018
FinFETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10354998B2Jul 16, 2019
Structures and methods for fabricating semiconductor devices using fin structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9871037B2Jan 16, 2018
Structures and methods for fabricating semiconductor devices using fin structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10658221B2May 19, 2020
Semiconductor wafer cleaning apparatus and method for cleaning semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12432954B2Sep 30, 2025
Semiconductor device structure with fin and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12310093B2May 20, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US11772134B2Oct 3, 2023
Sonic cleaning of brush
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
TAIWAN SEMICONDUCTOR MFG
7 patentsUS8987791B2Mar 24, 2015
FinFETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG18 citations92
US9362386B2Jun 7, 2016
FETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG8 citations84
US9159552B2Oct 13, 2015
Method of forming a germanium-containing FinFET
TAIWAN SEMICONDUCTOR MFG7 citations84
US9263586B2Feb 16, 2016
Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure
TAIWAN SEMICONDUCTOR MFG2 citations62
US9349841B2May 24, 2016
FinFETs and methods for forming the same
TAIWAN SEMICONDUCTOR MFG0 citations52
US9257323B2Feb 9, 2016
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG1 citations52
US9130059B2Sep 8, 2015
Method of fabricating a semiconductor device having a capping layer
TAIWAN SEMICONDUCTOR MFG1 citations52