P

Inventor

FAN CHUN-HSIANG

TW38 patents
⚠️ This page may combine multiple inventors who share the name “FAN CHUN-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

30 patents
US10199502B2Feb 5, 2019

Structure of S/D contact and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD145 citations99
US9543419B1Jan 10, 2017

FinFET structures and methods of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD25 citations94
US9536962B1Jan 3, 2017

Source/drain regions for high electron mobility transistors (HEMT) and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US9620633B2Apr 11, 2017

Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations83
US10446669B2Oct 15, 2019

Source and drain surface treatment for multi-gate field effect transistors

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10164116B2Dec 25, 2018

FETs and methods for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9818878B2Nov 14, 2017

FETs and methods for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9559206B2Jan 31, 2017

FinFETs with necking in the fins

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11158726B2Oct 26, 2021

Controlling fin-thinning through feedback

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10930784B2Feb 23, 2021

FETs and methods for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12176422B2Dec 24, 2024

Controlling fin-thinning through feedback

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923437B2Mar 5, 2024

Controlling fin-thinning through feedback

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11670717B2Jun 6, 2023

Structure of S/D contact and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11133200B2Sep 28, 2021

Substrate vapor drying apparatus and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12439643B2Oct 7, 2025

Fin shape modification

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12191380B2Jan 7, 2025

Semiconductor device and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11424347B2Aug 23, 2022

Semiconductor device and method

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12575121B2Mar 10, 2026

Reducing fin wriggling in fin-thinning process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11823945B2Nov 21, 2023

Method for cleaning semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10868149B2Dec 15, 2020

Source and drain surface treatment for multi-gate field effect transistors

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10693009B2Jun 23, 2020

Structure of S/D contact and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9953878B2Apr 24, 2018

Method of forming a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9929248B2Mar 27, 2018

Source/drain regions for high electron mobility transistors (HEMT) and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9887274B2Feb 6, 2018

FinFETs and methods for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10354998B2Jul 16, 2019

Structures and methods for fabricating semiconductor devices using fin structures

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9871037B2Jan 16, 2018

Structures and methods for fabricating semiconductor devices using fin structures

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10658221B2May 19, 2020

Semiconductor wafer cleaning apparatus and method for cleaning semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12432954B2Sep 30, 2025

Semiconductor device structure with fin and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12310093B2May 20, 2025

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US11772134B2Oct 3, 2023

Sonic cleaning of brush

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41

TAIWAN SEMICONDUCTOR MFG

7 patents

CHENG CHIEN-HONG

1 patent