Inventor
DE JONG HENDRIK JAN
NL14 patents
⚠️ This page may combine multiple inventors who share the name “DE JONG HENDRIK JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DE JONG HENDRIK JAN
4 patentsUS9460954B2Oct 4, 2016
Method of clamping a substrate and clamp preparation unit using capillary clamping force
DE JONG HENDRIK JAN283 citations98
US8436324B2May 7, 2013
Preparation unit for lithography machine
DE JONG HENDRIK JAN8 citations82
US8991330B2Mar 31, 2015
Substrate support structure, clamp preparation unit, and lithography system
DE JONG HENDRIK JAN2 citations60
US8514370B2Aug 20, 2013
Substrate support structure, clamp preparation unit, and lithography system
DE JONG HENDRIK JAN2 citations60
MAPPER LITHOGRAPHY IP BV
4 patentsUS9575418B2Feb 21, 2017
Apparatus for transferring a substrate in a lithography system
MAPPER LITHOGRAPHY IP BV4 citations83
US10078274B2Sep 18, 2018
Method and arrangement for handling and processing substrates
MAPPER LITHOGRAPHY IP BV2 citations72
US9117631B2Aug 25, 2015
Method of handling a substrate support structure in a lithography system
MAPPER LITHOGRAPHY IP BV1 citations51
US9922801B2Mar 20, 2018
Drying apparatus for use in a lithography system
MAPPER LITHOGRAPHY IP BV0 citations40