Inventor
MACK JAMES FRANCIS
US14 patents
Patents
14 patentsUS9845550B2Dec 19, 2017
Upper dome with injection assembly
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Thermal processing susceptor
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Thermal processing susceptor
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US10727093B2Jul 28, 2020
Light pipe window structure for low pressure thermal processes
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US10883190B2Jan 5, 2021
Apparatus and methods for alignment of a susceptor
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US9832816B2Nov 28, 2017
Absorbing reflector for semiconductor processing chamber
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US12400904B2Aug 26, 2025
Thermal processing susceptor
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US11859307B2Jan 2, 2024
Apparatus and methods for alignment of a susceptor
APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US10458040B2Oct 29, 2019
Upper dome with injection assembly
APPLIED MATERIALS INC1 citations62
US10061208B2Aug 28, 2018
Photonic activation of reactants for sub-micron feature formation using depleted beams
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US9869938B2Jan 16, 2018
Photonic activation of reactants for sub-micron feature formation using depleted beams
APPLIED MATERIALS INC0 citations51
US9466500B2Oct 11, 2016
Method and apparatus for direct formation of nanometer scaled features
APPLIED MATERIALS INC1 citations51
US10306708B2May 28, 2019
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC0 citations48