Inventor
SHERMAN STEVEN R
US12 patents
⚠️ This page may combine multiple inventors who share the name “SHERMAN STEVEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
5 patentsUS10971368B2Apr 6, 2021
Techniques for processing substrates using directional reactive ion etching
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US9934981B2Apr 3, 2018
Techniques for processing substrates using directional reactive ion etching
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US10310379B2Jun 4, 2019
Multiple patterning approach using ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations71
US10229832B2Mar 12, 2019
Techniques for forming patterned features using directional ions
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations62
US10629437B2Apr 21, 2020
Techniques and structure for forming dynamic random-access device using angled ions
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations41
TEL EPION INC
3 patentsUS7291558B2Nov 6, 2007
Copper interconnect wiring and method of forming thereof
TEL EPION INC17 citations84
US7799683B2Sep 21, 2010
Copper interconnect wiring and method and apparatus for forming thereof
TEL EPION INC9 citations83
US7838423B2Nov 23, 2010
Method of forming capping structures on one or more material layer surfaces
TEL EPION INC5 citations73