Inventor
GUNGOR FARUK
US12 patents
Patents
12 patentsUSRE47440EJun 18, 2019
Apparatus and method for providing uniform flow of gas
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US8955547B2Feb 17, 2015
Apparatus and method for providing uniform flow of gas
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US10407771B2Sep 10, 2019
Atomic layer deposition chamber with thermal lid
APPLIED MATERIALS INC12 citations81
US9109754B2Aug 18, 2015
Apparatus and method for providing uniform flow of gas
APPLIED MATERIALS INC4 citations73
US10770300B2Sep 8, 2020
Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity
APPLIED MATERIALS INC2 citations72
US10418246B2Sep 17, 2019
Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity
APPLIED MATERIALS INC4 citations72
US10175093B2Jan 8, 2019
Apparatus for sensing a level of a processing medium in a delivery apparatus
APPLIED MATERIALS INC2 citations71
US9145612B2Sep 29, 2015
Deposition of N-metal films comprising aluminum alloys
APPLIED MATERIALS INC3 citations63
USRE48994EMar 29, 2022
Apparatus and method for providing uniform flow of gas
APPLIED MATERIALS INC0 citations62
US11380557B2Jul 5, 2022
Apparatus and method for gas delivery in semiconductor process chambers
APPLIED MATERIALS INC0 citations54
US11598003B2Mar 7, 2023
Substrate processing chamber having heated showerhead assembly
APPLIED MATERIALS INC0 citations52
US9683287B2Jun 20, 2017
Deposition of films comprising aluminum alloys with high aluminum content
APPLIED MATERIALS INC0 citations52