Inventor
MOURA JAIRO T
US37 patents
⚠️ This page may combine multiple inventors who share the name “MOURA JAIRO T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
27 patentsUS10978330B2Apr 13, 2021
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC14 citations92
US9948155B2Apr 17, 2018
Sealed robot drive
BROOKS AUTOMATION INC16 citations92
US11476139B2Oct 18, 2022
Substrate process apparatus
BROOKS AUTOMATION INC8 citations84
US10600665B2Mar 24, 2020
Substrate processing apparatus
BROOKS AUTOMATION INC4 citations84
US10325795B2Jun 18, 2019
Substrate processing apparatus
BROOKS AUTOMATION INC7 citations84
US9852935B2Dec 26, 2017
Substrate processing apparatus
BROOKS AUTOMATION INC4 citations84
US9230841B2Jan 5, 2016
Substrate processing apparatus
BROOKS AUTOMATION INC8 citations84
US10002781B2Jun 19, 2018
Tool auto-teach method and apparatus
BROOKS AUTOMATION INC9 citations83
US10134623B2Nov 20, 2018
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC9 citations82
US11444521B2Sep 13, 2022
Sealed switched reluctance motor
BROOKS AUTOMATION INC2 citations73
US10468936B2Nov 5, 2019
Sealed robot drive
BROOKS AUTOMATION INC3 citations73
US10348172B2Jul 9, 2019
Sealed switched reluctance motor
BROOKS AUTOMATION INC3 citations73
US11508597B2Nov 22, 2022
High speed substrate aligner apparatus
BROOKS AUTOMATION INC2 citations72
US10843341B2Nov 24, 2020
Method and apparatus for health assessment of a transport apparatus
BROOKS AUTOMATION INC2 citations72
US10381252B2Aug 13, 2019
Tool auto-teach method and apparatus
BROOKS AUTOMATION INC1 citations72
US10651067B2May 12, 2020
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC2 citations71
US10742092B2Aug 11, 2020
Position feedback for sealed environments
BROOKS AUTOMATION INC1 citations70
US11799346B2Oct 24, 2023
Sealed robot drive
BROOKS AUTOMATION INC0 citations62
US11338437B2May 24, 2022
Method and apparatus for health assessment of a transport apparatus
BROOKS AUTOMATION INC0 citations62
US11972965B2Apr 30, 2024
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC0 citations61
US11821953B2Nov 21, 2023
Method and apparatus for brushless electrical machine control
BROOKS AUTOMATION INC0 citations61
US11469126B2Oct 11, 2022
Tool auto-teach method and apparatus
BROOKS AUTOMATION INC0 citations61
US11251059B2Feb 15, 2022
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC0 citations61
US11181582B2Nov 23, 2021
Method and apparatus for brushless electrical machine control
BROOKS AUTOMATION INC0 citations61
US11404939B2Aug 2, 2022
Position feedback for sealed environments
BROOKS AUTOMATION INC0 citations60
US10770325B2Sep 8, 2020
Tool auto-teach method and apparatus
BROOKS AUTOMATION INC0 citations51
US10564221B2Feb 18, 2020
Method and apparatus for brushless electrical machine control
BROOKS AUTOMATION INC0 citations51
BROOKS AUTOMATION US LLC
7 patentsUS11862498B2Jan 2, 2024
Substrate processing apparatus
BROOKS AUTOMATION US LLC2 citations71
US12539612B2Feb 3, 2026
Method and apparatus for health assessment of a transport apparatus
BROOKS AUTOMATION US LLC0 citations62
US11787058B2Oct 17, 2023
Method and apparatus for health assessment of a transport apparatus
BROOKS AUTOMATION US LLC0 citations62
US11908721B2Feb 20, 2024
Tool auto-teach method and apparatus
BROOKS AUTOMATION US LLC0 citations61
US12266554B2Apr 1, 2025
Substrate processing apparatus
BROOKS AUTOMATION US LLC0 citations60
US11923729B2Mar 5, 2024
Position feedback for sealed environments
BROOKS AUTOMATION US LLC0 citations60
US12206342B2Jan 21, 2025
Substrate processing apparatus
BROOKS AUTOMATION US LLC0 citations47