Inventor
MAHER CHRISTOPHER
US5 patents
⚠️ This page may combine multiple inventors who share the name “MAHER CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS11047806B2Jun 29, 2021
Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures
KLA TENCOR CORP8 citations78
US10535131B2Jan 14, 2020
Systems and methods for region-adaptive defect detection
KLA TENCOR CORP3 citations68
US9754761B2Sep 5, 2017
High-speed hotspot or defect imaging with a charged particle beam system
KLA TENCOR CORP0 citations39