Inventor

DANEN ROBERT M

US18 patents

⚠️ This page may combine multiple inventors who share the name “DANEN ROBERT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DANEN ROBERT M

KLA TENCOR CORP

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Apparatus and methods for determining defect depths in vertical stack memory

Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen

Three-dimensional imaging for semiconductor wafer inspection

Methods and systems for selecting recipe for defect inspection

Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures

Determining information for defects on wafers

System and method for apodization in a semiconductor device inspection system

System and method for apodization in a semiconductor device inspection system

Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor wafer

Phase filter for enhanced defect detection in multilayer structure

Phase filter for enhanced defect detection in multilayer structure

Wafer and reticle inspection systems and methods for selecting illumination pupil configurations

Wafer and reticle inspection systems and methods for selecting illumination pupil configurations

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Determining information for defects on wafers

KLA CORP

Inspection with previous step subtraction

LANGE STEVEN R

Optical defect amplification for improved sensitivity on patterned layers