Inventor

LU XUESONG

US19 patents

⚠️ This page may combine multiple inventors who share the name “LU XUESONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LU XUESONG

APPLIED MATERIALS INC

Directional selective junction clean with field polymer protections

Deposition methods for uniform and conformal hybrid titanium oxide films

Chamber matching and calibration

Directional selective junction clean with field polymer protections

Methods for controlling contact resistance in cobalt-titanium structures

Method of cleaning a structure and method of depositing a capping layer in a structure

Methods and apparatus for controlling contact resistance in cobalt-titanium structures

Advanced coating method and materials to prevent HDP-CVD chamber arcing

Methodology for chamber performance matching for semiconductor equipment

Advanced in-situ particle detection system for semiconductor substrate processing systems

Advanced coating method and materials to prevent HDP-CVD chamber arcing

Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber

Advanced temperature monitoring system and methods for semiconductor manufacture productivity

Advanced in-situ particle detection system for semiconductor substrate processing systems

PETROCHINA CO LTD

Core holder for micron CT observation and experimental method thereof

Method for determining gas saturation of tight reservoir

Method and apparatus for measuring oil content of tight reservoir based on nuclear magnetic resonance

Method for determining oil contents in rock formations

Method for determining maturity in oil source rock by total scanning fluorescence and the device therefor