Inventor
HUISMAN SIMON REINALD
NL31 patents
⚠️ This page may combine multiple inventors who share the name “HUISMAN SIMON REINALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
27 patentsUS11360399B2Jun 14, 2022
Metrology sensor for position metrology
ASML NETHERLANDS BV10 citations85
US10690995B2Jun 23, 2020
Radiation source
ASML NETHERLANDS BV6 citations73
US10508906B2Dec 17, 2019
Method of measuring a parameter and apparatus
ASML NETHERLANDS BV4 citations73
US12025925B2Jul 2, 2024
Metrology method and lithographic apparatuses
ASML NETHERLANDS BV6 citations72
US10788766B2Sep 29, 2020
Metrology sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV4 citations72
US10317808B2Jun 11, 2019
Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
ASML NETHERLANDS BV3 citations72
US11906906B2Feb 20, 2024
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV2 citations71
US10585363B2Mar 10, 2020
Alignment system
ASML NETHERLANDS BV4 citations70
US11175593B2Nov 16, 2021
Alignment sensor apparatus for process sensitivity compensation
ASML NETHERLANDS BV4 citations69
US11042096B2Jun 22, 2021
Alignment measurement system
ASML NETHERLANDS BV2 citations69
US10788765B2Sep 29, 2020
Method and apparatus for measuring a structure on a substrate
ASML NETHERLANDS BV4 citations69
US12591184B2Mar 31, 2026
Enhanced alignment for a photolithographic apparatus
ASML NETHERLANDS BV0 citations62
US12282263B2Apr 22, 2025
Metrology system and lithographic system
ASML NETHERLANDS BV0 citations62
US11815675B2Nov 14, 2023
Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element
ASML NETHERLANDS BV0 citations62
US11556068B2Jan 17, 2023
Detection system for an alignment sensor
ASML NETHERLANDS BV0 citations62
US11409206B2Aug 9, 2022
Alignment method and apparatus
ASML NETHERLANDS BV0 citations62
US11333985B2May 17, 2022
Position sensor
ASML NETHERLANDS BV0 citations62
US10942461B2Mar 9, 2021
Alignment measurement system
ASML NETHERLANDS BV0 citations62
US11474435B2Oct 18, 2022
Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter
ASML NETHERLANDS BV0 citations61
US11300892B2Apr 12, 2022
Sensor apparatus and method for lithographic measurements
ASML NETHERLANDS BV0 citations61
US11221565B2Jan 11, 2022
Level sensor and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US11181835B2Nov 23, 2021
Metrology sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV0 citations61
US11762305B2Sep 19, 2023
Alignment method
ASML NETHERLANDS BV0 citations59
US12585198B2Mar 24, 2026
Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method
ASML NETHERLANDS BV0 citations50
US12326669B2Jun 10, 2025
Illumination apparatus and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV0 citations50
US11803130B2Oct 31, 2023
Phase modulators in alignment to decrease mark size
ASML NETHERLANDS BV0 citations50
US10527959B2Jan 7, 2020
Position sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV0 citations41
ASML HOLDING NV
3 patentsUS12124177B2Oct 22, 2024
Overlay measurement system using lock-in amplifier technique
ASML HOLDING NV2 citations72
US12585201B2Mar 24, 2026
Metrology mark structure and method of determining metrology mark structure
ASML HOLDING NV0 citations51
US12572083B2Mar 10, 2026
Intensity order difference based metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations50