Inventor
ZHANG HUANBO
US18 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG HUANBO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS6811470B2Nov 2, 2004
Methods and compositions for chemical mechanical polishing shallow trench isolation substrates
APPLIED MATERIALS INC20 citations90
US10022837B2Jul 17, 2018
Inner retaining ring and outer retaining ring for carrier head
APPLIED MATERIALS INC6 citations83
US8840446B2Sep 23, 2014
Inner retaining ring and outer retaining ring for carrier head
APPLIED MATERIALS INC5 citations83
US10493590B2Dec 3, 2019
Selection of polishing parameters to generate removal or pressure profile
APPLIED MATERIALS INC8 citations82
US9213340B2Dec 15, 2015
Selection of polishing parameters to generate removal or pressure profile
APPLIED MATERIALS INC11 citations82
US11400560B2Aug 2, 2022
Retaining ring design
APPLIED MATERIALS INC6 citations74
US11931853B2Mar 19, 2024
Control of processing parameters for substrate polishing with angularly distributed zones using cost function
APPLIED MATERIALS INC2 citations73
US11173579B2Nov 16, 2021
Inner retaining ring and outer retaining ring for carrier head
APPLIED MATERIALS INC1 citations72
US10322492B2Jun 18, 2019
Retaining ring for CMP
APPLIED MATERIALS INC3 citations72
US12343840B2Jul 1, 2025
Control of processing parameters for substrate polishing with substrate precession
APPLIED MATERIALS INC0 citations62
US11869815B2Jan 9, 2024
Asymmetry correction via oriented wafer loading
APPLIED MATERIALS INC0 citations62
US11673226B2Jun 13, 2023
Retaining ring for CMP
APPLIED MATERIALS INC0 citations62
US11282755B2Mar 22, 2022
Asymmetry correction via oriented wafer loading
APPLIED MATERIALS INC1 citations62
US11241769B2Feb 8, 2022
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes
APPLIED MATERIALS INC0 citations58
US12551981B2Feb 17, 2026
Machine learning for classifying retaining rings
APPLIED MATERIALS INC0 citations51
US10252397B2Apr 9, 2019
Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes
APPLIED MATERIALS INC0 citations48