Inventor
ZHU ZHIZE
US11 patents
⚠️ This page may combine multiple inventors who share the name “ZHU ZHIZE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS8039397B2Oct 18, 2011
Using optical metrology for within wafer feed forward process control
APPLIED MATERIALS INC20 citations92
US7514353B2Apr 7, 2009
Contact metallization scheme using a barrier layer over a silicide layer
APPLIED MATERIALS INC37 citations90
US11931853B2Mar 19, 2024
Control of processing parameters for substrate polishing with angularly distributed zones using cost function
APPLIED MATERIALS INC2 citations73
US12343840B2Jul 1, 2025
Control of processing parameters for substrate polishing with substrate precession
APPLIED MATERIALS INC0 citations62
US11869815B2Jan 9, 2024
Asymmetry correction via oriented wafer loading
APPLIED MATERIALS INC0 citations62
US11282755B2Mar 22, 2022
Asymmetry correction via oriented wafer loading
APPLIED MATERIALS INC1 citations62
US12551981B2Feb 17, 2026
Machine learning for classifying retaining rings
APPLIED MATERIALS INC0 citations51
DAVID JEFFREY DRUE
4 patentsUS8292693B2Oct 23, 2012
Using optical metrology for wafer to wafer feed back process control
DAVID JEFFREY DRUE16 citations92
US8814631B2Aug 26, 2014
Tracking spectrum features in two dimensions for endpoint detection
DAVID JEFFREY DRUE13 citations82
US8679979B2Mar 25, 2014
Using optical metrology for within wafer feed forward process control
DAVID JEFFREY DRUE3 citations62
US8579675B2Nov 12, 2013
Methods of using optical metrology for feed back and feed forward process control
DAVID JEFFREY DRUE0 citations52