Inventor
SASE YUICHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SASE YUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12368030B2Jul 22, 2025
Deposition method and deposition apparatus
TOKYO ELECTRON LTD1 citations63
US7762809B2Jul 27, 2010
Heat treatment apparatus
TOKYO ELECTRON LTD3 citations60
US12205817B2Jan 21, 2025
Method for depositing film and film deposition system
TOKYO ELECTRON LTD0 citations59
US11905595B2Feb 20, 2024
Film deposition apparatus and film deposition method
TOKYO ELECTRON LTD0 citations48