Inventor
VAN DER POST SIETSE THIJMEN
NL16 patents
Patents
16 patentsUS10451559B2Oct 22, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV3 citations72
US10330606B2Jun 25, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV3 citations72
US10725381B2Jul 28, 2020
Optical systems, metrology apparatus and associated method
ASML NETHERLANDS BV3 citations71
US10488765B2Nov 26, 2019
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus
ASML NETHERLANDS BV2 citations71
US9851246B2Dec 26, 2017
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV4 citations71
US10126659B2Nov 13, 2018
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV3 citations68
US12269229B2Apr 8, 2025
Reflector manufacturing method and associated reflector
ASML NETHERLANDS BV0 citations61
US10613448B2Apr 7, 2020
Method and apparatus for determining alignment properties of a beam of radiation
ASML NETHERLANDS BV1 citations61
US10248029B2Apr 2, 2019
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV1 citations61
US11815402B2Nov 14, 2023
Wavefront sensor and associated metrology apparatus
ASML NETHERLANDS BV0 citations60
US11626704B2Apr 11, 2023
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV1 citations59
US12164125B2Dec 10, 2024
Manufacturing a reflective diffraction grating
ASML NETHERLANDS BV0 citations51
US10578979B2Mar 3, 2020
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations51
US10712673B2Jul 14, 2020
Method of determining a property of a structure, inspection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US11243470B2Feb 8, 2022
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
ASML NETHERLANDS BV0 citations49
US12416870B2Sep 16, 2025
Measuring method and measuring apparatus
ASML NETHERLANDS BV0 citations45