Inventor
DYKSTRA JERALD P
18 patents
⚠️ This page may combine multiple inventors who share the name “DYKSTRA JERALD P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EATON CORP
6 patentsUS5177366AJan 5, 1993
Ion beam implanter for providing cross plane focusing
EATON CORP68 citations95
US5091655AFeb 25, 1992
Reduced path ion beam implanter
EATON CORP64 citations95
US4943728AJul 24, 1990
Beam pattern control system for an ion implanter
EATON CORP24 citations92
US4929840AMay 29, 1990
Wafer rotation control for an ion implanter
EATON CORP26 citations92
US4700077AOct 13, 1987
Ion beam implanter control system
EATON CORP18 citations73
US4514637AApr 30, 1985
Atomic mass measurement system
EATON CORP8 citations66
EPION CORP
6 patentsUS6635883B2Oct 21, 2003
Gas cluster ion beam low mass ion filter
EPION CORP53 citations94
US6331227B1Dec 18, 2001
Enhanced etching/smoothing of dielectric surfaces
EPION CORP77 citations94
US6737643B2May 18, 2004
Detector and method for cluster ion beam diagnostics
EPION CORP29 citations91
US6624081B2Sep 23, 2003
Enhanced etching/smoothing of dielectric surfaces
EPION CORP36 citations90
US6770874B2Aug 3, 2004
Gas cluster ion beam size diagnostics and workpiece processing
EPION CORP16 citations84
US6629508B2Oct 7, 2003
Ionizer for gas cluster ion beam formation
EPION CORP18 citations84