Inventor
SEKIYA AKIRA
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SEKIYA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGENCY IND SCIENCE TECHN
8 patentsUS6514425B1Feb 4, 2003
Dry etching gas
AGENCY IND SCIENCE TECHN23 citations89
US6403846B1Jun 11, 2002
Fluorinated, saturated hydrocarbons
AGENCY IND SCIENCE TECHN14 citations81
US6211420B1Apr 3, 2001
Process for the preparation of fluorinated olefin
AGENCY IND SCIENCE TECHN8 citations73
US5302764AApr 12, 1994
Process for preparing trifluorohydrocarbon compound
AGENCY IND SCIENCE TECHN3 citations62
US5071915ADec 10, 1991
Fluorine-containing polymeric compound and a method for the preparation thereof
AGENCY IND SCIENCE TECHN3 citations62
US5001198AMar 19, 1991
Fluorine-containing polymeric compound and a method for the preparation thereof
AGENCY IND SCIENCE TECHN2 citations62
US4822860AApr 18, 1989
Fluorine-containing polymeric amine-amide compound and a method for the preparation thereof
AGENCY IND SCIENCE TECHN5 citations62
US4997886AMar 5, 1991
Fluorine-containing polymeric compound and method for the preparation thereof
AGENCY IND SCIENCE TECHN0 citations51
NAT INST OF ADVANCED IND SCIEN
4 patentsUS8043438B2Oct 25, 2011
Device for cleaning CVD device and method of cleaning CVD device
NAT INST OF ADVANCED IND SCIEN4 citations61
US7332628B2Feb 19, 2008
Process for producing carbonyl fluoride
NAT INST OF ADVANCED IND SCIEN1 citations50
US7138364B2Nov 21, 2006
Cleaning gas and etching gas
NAT INST OF ADVANCED IND SCIEN0 citations50
US7247289B2Jul 24, 2007
Porous aluminum fluoride
NAT INST OF ADVANCED IND SCIEN0 citations46