Inventor
HWANG BEOM SOO
KR4 patents
Patents
4 patentsUS10730346B2Aug 4, 2020
Caster apparatus and transferring apparatus including the same
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US12233560B2Feb 25, 2025
Automated gas supply system
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US11904480B2Feb 20, 2024
Automated gas supply system
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US12552619B2Feb 17, 2026
Wafer transfer apparatus, wafer transfer system, and method for removing particles in wafer transfer apparatus
SAMSUNG ELECTRONICS CO LTD0 citations43