Inventor
FUNABA SHINJI
JP7 patents
Patents
7 patentsUS5880489AMar 9, 1999
Semiconductor photodetector
MITSUBISHI ELECTRIC CORP24 citations91
US5811842ASep 22, 1998
Semiconductor photodetector including background light region
MITSUBISHI ELECTRIC CORP9 citations71
US5352628AOct 4, 1994
Method of forming diffusion region of semiconductor device by solid phase diffusion
MITSUBISHI ELECTRIC CORP12 citations71
US5346837ASep 13, 1994
Method of making avalanche photodiode
MITSUBISHI ELECTRIC CORP6 citations71
US5281844AJan 25, 1994
Avalanche photodiode
MITSUBISHI ELECTRIC CORP9 citations71
US5061977AOct 29, 1991
Semiconductor photodetector device
MITSUBISHI ELECTRIC CORP15 citations71
US5677565AOct 14, 1997
Monocrystalline compound semiconductor wafer including non-monocrystalline peripheral region
MITSUBISHI ELECTRIC CORP2 citations60