Inventor
FUKUTOMI YOSHITERU
JP27 patents
⚠️ This page may combine multiple inventors who share the name “FUKUTOMI YOSHITERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
12 patentsUS6893171B2May 17, 2005
Substrate treating apparatus
DAINIPPON SCREEN MFG131 citations98
US5677000AOct 14, 1997
Substrate spin treating method and apparatus
DAINIPPON SCREEN MFG62 citations96
US5322079AJun 21, 1994
Substrate holding apparatus of a simple structure for holding a rotating substrate, and a substrate processing apparatus including the substrate holding apparatus
DAINIPPON SCREEN MFG63 citations96
US5430271AJul 4, 1995
Method of heat treating a substrate with standby and treatment time periods
DAINIPPON SCREEN MFG80 citations94
US5906469AMay 25, 1999
Apparatus and method for detecting and conveying substrates in cassette
DAINIPPON SCREEN MFG90 citations93
US5765072AJun 9, 1998
Treating solution supplying method and substrate treating apparatus
DAINIPPON SCREEN MFG36 citations93
US6752543B2Jun 22, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG38 citations92
US5792259AAug 11, 1998
Substrate processing apparatus and air supply method in substrate processing apparatus
DAINIPPON SCREEN MFG21 citations92
US5639301AJun 17, 1997
Processing apparatus having parts for thermal and non-thermal treatment of substrates
DAINIPPON SCREEN MFG42 citations92
US5359785ANov 1, 1994
Substrate transport apparatus
DAINIPPON SCREEN MFG24 citations92
US5308210AMay 3, 1994
Interface apparatus for transporting substrates between substrate processing apparatus
DAINIPPON SCREEN MFG22 citations91
US5201653AApr 13, 1993
Substrate heat-treating apparatus
DAINIPPON SCREEN MFG24 citations89
FUKUTOMI YOSHITERU
5 patentsUS8851008B2Oct 7, 2014
Parallel substrate treatment for a plurality of substrate treatment lines
FUKUTOMI YOSHITERU24 citations92
US9230834B2Jan 5, 2016
Substrate treating apparatus
FUKUTOMI YOSHITERU4 citations83
US9165807B2Oct 20, 2015
Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units
FUKUTOMI YOSHITERU10 citations83
US8985937B2Mar 24, 2015
Stocker apparatus and substrate treating apparatus
FUKUTOMI YOSHITERU6 citations72
US9174235B2Nov 3, 2015
Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines
FUKUTOMI YOSHITERU3 citations62
SOKUDO CO LTD
4 patentsUS7641405B2Jan 5, 2010
Substrate processing apparatus with integrated top and edge cleaning unit
SOKUDO CO LTD20 citations92
US8708587B2Apr 29, 2014
Substrate treating apparatus with inter-unit buffers
SOKUDO CO LTD14 citations84
US8031324B2Oct 4, 2011
Substrate processing apparatus with integrated cleaning unit
SOKUDO CO LTD3 citations63
US9368383B2Jun 14, 2016
Substrate treating apparatus with substrate reordering
SOKUDO CO LTD2 citations62
OGURA HIROYUKI
3 patentsUS9184071B2Nov 10, 2015
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
OGURA HIROYUKI17 citations92
US8545118B2Oct 1, 2013
Substrate treating apparatus with inter-unit buffers
OGURA HIROYUKI25 citations92
US9299596B2Mar 29, 2016
Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates
OGURA HIROYUKI2 citations62
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD
3 patentsUS10290521B2May 14, 2019
Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations72
US9687874B2Jun 27, 2017
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD2 citations72
US12217986B2Feb 4, 2025
Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations63