Inventor
KOYAMA YASUFUMI
JP14 patents
Patents
14 patentsUS5906469AMay 25, 1999
Apparatus and method for detecting and conveying substrates in cassette
DAINIPPON SCREEN MFG90 citations93
US7069099B2Jun 27, 2006
Method of transporting and processing substrates in substrate processing apparatus
DAINIPPON SCREEN MFG27 citations92
US6937917B2Aug 30, 2005
Substrate processing apparatus, operation method thereof and program
DAINIPPON SCREEN MFG35 citations92
US6253118B1Jun 26, 2001
Substrate transport method and apparatus
DAINIPPON SCREEN MFG47 citations92
US5111332AMay 5, 1992
Method of and apparatus for controlling deflection of optical beams
DAINIPPON SCREEN MFG39 citations92
US6837632B2Jan 4, 2005
Substrate treating apparatus
DAINIPPON SCREEN MFG30 citations90
US7317961B2Jan 8, 2008
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus
DAINIPPON SCREEN MFG15 citations83
US7525650B2Apr 28, 2009
Substrate processing apparatus for performing photolithography
DAINIPPON SCREEN MFG19 citations82
US4896169AJan 23, 1990
Laser scan recording apparatus using aperture plates to form shifted rows of beams which are modulated and converged on photosensitive material
DAINIPPON SCREEN MFG8 citations73
US7563323B2Jul 21, 2009
Substrate treating apparatus
DAINIPPON SCREEN MFG5 citations62
US7497912B2Mar 3, 2009
Substrate processing apparatus
DAINIPPON SCREEN MFG6 citations62
US7229240B2Jun 12, 2007
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG2 citations62
US5184313AFeb 2, 1993
Conversion device for laser interferometic measuring apparatus
DAINIPPON SCREEN MFG4 citations62
US5065445ANov 12, 1991
Apparatus for expanding and formatting runlength data for multiple exposure beams
DAINIPPON SCREEN MFG1 citations51