Inventor

IGA MASAO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “IGA MASAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

M FSI LTD

2 patents

US6874516B2Apr 5, 2005

Substrate cleaning apparatus

M FSI LTD69 citations92

US6983756B2Jan 10, 2006

Substrate treatment process and apparatus

M FSI LTD6 citations69

FUJITSU LTD

2 patents

US6024045AFeb 15, 2000

Apparatus for fabricating semiconductor device and method for fabricating semiconductor device

FUJITSU LTD18 citations92

US5919336AJul 6, 1999

Apparatus for fabricating semiconductor device and method for fabricating semiconductor device

FUJITSU LTD15 citations81

M & CIRCLESOLID FSI LTD

1 patent

US6743301B2Jun 1, 2004

Substrate treatment process and apparatus

M & CIRCLESOLID FSI LTD34 citations86