Inventor
KAWAKUBO MASAHARU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KAWAKUBO MASAHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS6876946B2Apr 5, 2005
Alignment method and apparatus therefor
NIKON CORP80 citations98
US6278957B1Aug 21, 2001
Alignment method and apparatus therefor
NIKON CORP116 citations98
US5989761ANov 23, 1999
Exposure methods for overlaying one mask pattern on another
NIKON CORP79 citations96
US5654553AAug 5, 1997
Projection exposure apparatus having an alignment sensor for aligning a mask image with a substrate
NIKON CORP81 citations96
US6163366ADec 19, 2000
Exposure method and apparatus
NIKON CORP53 citations95
US6219130B1Apr 17, 2001
Position detecting apparatus
NIKON CORP20 citations92
US6141107AOct 31, 2000
Apparatus for detecting a position of an optical mark
NIKON CORP27 citations92
US6100987AAug 8, 2000
Position detecting apparatus
NIKON CORP30 citations92
US5863680AJan 26, 1999
Exposure method utilizing alignment of superimposed layers
NIKON CORP43 citations92
US5561606AOct 1, 1996
Method for aligning shot areas on a substrate
NIKON CORP48 citations92
US7817242B2Oct 19, 2010
Exposure method and device manufacturing method, exposure apparatus, and program
NIKON CORP15 citations77
US6331369B1Dec 18, 2001
Exposure methods for overlaying one mask pattern on another
NIKON CORP12 citations74
US5760411AJun 2, 1998
Alignment method for positioning a plurality of shot areas on a substrate
NIKON CORP15 citations73
US6372395B2Apr 16, 2002
Exposure method for overlaying one mask pattern on another
NIKON CORP3 citations63