Inventor

CAVAN DANIEL L

US10 patents

⚠️ This page may combine multiple inventors who share the name “CAVAN DANIEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INSYSTEMS INC

3 patents

US4806774AFeb 21, 1989

Inspection system for array of microcircuit dies having redundant circuit patterns

INSYSTEMS INC140 citations95

US4811409AMar 7, 1989

Method and apparatus for detecting defect information in a holographic image pattern

INSYSTEMS INC32 citations91

US4659172AApr 21, 1987

Rotatable and translatable mounting mechanism for a specimen pattern in optical processing apparatus

INSYSTEMS INC17 citations72

KLA TENCOR CORP

2 patents

US10429319B2Oct 1, 2019

Inspection system including parallel imaging paths with multiple and selectable spectral bands

KLA TENCOR CORP1 citations61

US9128064B2Sep 8, 2015

Super resolution inspection system

KLA TENCOR CORP2 citations61

KLA TENCOR TECH CORP

1 patent

US7227984B2Jun 5, 2007

Method and apparatus for identifying defects in a substrate surface by using dithering to reconstruct under-sampled images

KLA TENCOR TECH CORP37 citations91

PERKIN ELMER CORP

1 patent

US4788431ANov 29, 1988

Specimen distance measuring system

PERKIN ELMER CORP21 citations80

(unassigned)

1 patent

US6316164B1Nov 13, 2001

Proximity effect correction method through uniform removal of fraction of interior pixels

YOUNG SCOTT A

1 patent

US8643835B2Feb 4, 2014

Active planar autofocus

YOUNG SCOTT A4 citations69

CAVAN DANIEL L

1 patent

US9703207B1Jul 11, 2017

System and method for reducing dynamic range in images of patterned regions of semiconductor wafers

CAVAN DANIEL L5 citations67