Inventor
JIN GUANGXIANG
US11 patents
⚠️ This page may combine multiple inventors who share the name “JIN GUANGXIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6692903B2Feb 17, 2004
Substrate cleaning apparatus and method
APPLIED MATERIALS INC414 citations97
US6893893B2May 17, 2005
Method of preventing short circuits in magnetic film stacks
APPLIED MATERIALS INC37 citations92
US6821907B2Nov 23, 2004
Etching methods for a magnetic memory cell stack
APPLIED MATERIALS INC36 citations92
US6368517B1Apr 9, 2002
Method for preventing corrosion of a dielectric material
APPLIED MATERIALS INC41 citations92
US7094704B2Aug 22, 2006
Method of plasma etching of high-K dielectric materials
APPLIED MATERIALS INC11 citations84
US7368394B2May 6, 2008
Etch methods to form anisotropic features for high aspect ratio applications
APPLIED MATERIALS INC11 citations82
US7217665B2May 15, 2007
Method of plasma etching high-K dielectric materials with high selectivity to underlying layers
APPLIED MATERIALS INC8 citations73
US7838434B2Nov 23, 2010
Method of plasma etching of high-K dielectric materials
APPLIED MATERIALS INC1 citations52
US6730561B2May 4, 2004
Method of forming a cup capacitor
APPLIED MATERIALS INC1 citations51