Inventor
USHIJIMA MITSURU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “USHIJIMA MITSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS5442416AAug 15, 1995
Resist processing method
TOKYO ELECTRON LTD138 citations99
US5202716AApr 13, 1993
Resist process system
TOKYO ELECTRON LTD146 citations99
US4985722AJan 15, 1991
Apparatus for coating a photo-resist film and/or developing it after being exposed
TOKYO ELECTRON LTD144 citations99
US5393624AFeb 28, 1995
Method and apparatus for manufacturing a semiconductor device
TOKYO ELECTRON LTD228 citations98
US5339128AAug 16, 1994
Resist processing method
TOKYO ELECTRON LTD81 citations96
US5177514AJan 5, 1993
Apparatus for coating a photo-resist film and/or developing it after being exposed
TOKYO ELECTRON LTD75 citations96
US5089305AFeb 18, 1992
Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state
TOKYO ELECTRON LTD74 citations96
US5002008AMar 26, 1991
Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
TOKYO ELECTRON LTD115 citations96
US7169283B2Jan 30, 2007
Anodization device and anodization method
TOKYO ELECTRON LTD3 citations62
US7118663B2Oct 10, 2006
Anodic oxidizer, anodic oxidation method
TOKYO ELECTRON LTD1 citations51