Inventor

BLASCHITZ HERBERT

DE7 patents

⚠️ This page may combine multiple inventors who share the name “BLASCHITZ HERBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JENOPTIK JENA GMBH

2 patents

US5772386AJun 30, 1998

Loading and unloading station for semiconductor processing installations

JENOPTIK JENA GMBH186 citations98

US6461094B1Oct 8, 2002

Loading and unloading station for semiconductor processing installations

JENOPTIK JENA GMBH15 citations92

BROOKS AUTOMATION INC

2 patents

US6837663B2Jan 4, 2005

Loading and unloading station for semiconductor processing installations

BROOKS AUTOMATION INC32 citations95

US6609876B2Aug 26, 2003

Loading and unloading station for semiconductor processing installations

BROOKS AUTOMATION INC34 citations95

BROOKS AUTOMATION GMBH

2 patents

US6375403B1Apr 23, 2002

Loading and unloading station for semiconductor processing installations

BROOKS AUTOMATION GMBH44 citations95

US6071059AJun 6, 2000

Loading and unloading station for semiconductor processing installations

BROOKS AUTOMATION GMBH68 citations95

M W GROUP GMBH

1 patent

US10208488B2Feb 19, 2019

Processing facility for manufacturing integrated circuits from semiconductor wafers as well as perforated panel for a processing facility

M W GROUP GMBH1 citations47