Inventor

GANS FRITZ

DE4 patents

⚠️ This page may combine multiple inventors who share the name “GANS FRITZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

3 patents

US6627392B2Sep 30, 2003

Method of transferring a pattern of high structure density by multiple exposure of less dense partial patterns

INFINEON TECHNOLOGIES AG14 citations81

US6692875B2Feb 17, 2004

Mask for optical projection systems, and a process for its production

INFINEON TECHNOLOGIES AG7 citations72

US6953644B2Oct 11, 2005

Method for compensating for scatter/reflection effects in particle beam lithography

INFINEON TECHNOLOGIES AG2 citations53

SIEMENS AG

1 patent

US6466373B1Oct 15, 2002

Trimming mask with semitransparent phase-shifting regions

SIEMENS AG7 citations69