Inventor
WILCOXSON MARK H
US13 patents
⚠️ This page may combine multiple inventors who share the name “WILCOXSON MARK H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS6341574B1Jan 29, 2002
Plasma processing systems
LAM RES CORP135 citations97
US9543148B1Jan 10, 2017
Mask shrink layer for high aspect ratio dielectric etch
LAM RES CORP56 citations95
US9620377B2Apr 11, 2017
Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch
LAM RES CORP25 citations93
US7294580B2Nov 13, 2007
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
LAM RES CORP29 citations92
US6744213B2Jun 1, 2004
Antenna for producing uniform process rates
LAM RES CORP33 citations92
US7022611B1Apr 4, 2006
Plasma in-situ treatment of chemically amplified resist
LAM RES CORP14 citations84
US6518705B2Feb 11, 2003
Method and apparatus for producing uniform process rates
LAM RES CORP16 citations84
US10431458B2Oct 1, 2019
Mask shrink layer for high aspect ratio dielectric etch
LAM RES CORP11 citations82
US10170323B2Jan 1, 2019
Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch
LAM RES CORP11 citations82
US7347915B1Mar 25, 2008
Plasma in-situ treatment of chemically amplified resist
LAM RES CORP8 citations73
US6873112B2Mar 29, 2005
Method for producing a semiconductor device
LAM RES CORP7 citations73