Inventor
SMITH MICHAEL G R
US12 patents
⚠️ This page may combine multiple inventors who share the name “SMITH MICHAEL G R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS6954993B1Oct 18, 2005
Concentric proximity processing head
LAM RES CORP64 citations96
US7389783B2Jun 24, 2008
Proximity meniscus manifold
LAM RES CORP24 citations92
US7383843B2Jun 10, 2008
Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer
LAM RES CORP28 citations92
US6302966B1Oct 16, 2001
Temperature control system for plasma processing apparatus
LAM RES CORP42 citations92
US6518705B2Feb 11, 2003
Method and apparatus for producing uniform process rates
LAM RES CORP16 citations84
US6995067B2Feb 7, 2006
Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency
LAM RES CORP10 citations73
US7293571B2Nov 13, 2007
Substrate proximity processing housing and insert for generating a fluid meniscus
LAM RES CORP4 citations62
US7909934B2Mar 22, 2011
Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency
LAM RES CORP0 citations52
US7406972B2Aug 5, 2008
Substrate proximity processing structures
LAM RES CORP1 citations52
US12186851B2Jan 7, 2025
Use of vacuum during transfer of substrates
LAM RES CORP0 citations51
US7534307B2May 19, 2009
Methods for processing wafer surfaces using thin, high velocity fluid layer
LAM RES CORP1 citations51