Inventor
YI JONG-SEUNG
KR6 patents
Patents
6 patentsUS6569782B2May 27, 2003
Insulating layer, semiconductor device and methods for fabricating the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US6451694B1Sep 17, 2002
Control of abnormal growth in dichloro silane (DCS) based CVD polycide WSix films
SAMSUNG ELECTRONICS CO LTD5 citations60
US6387776B1May 14, 2002
Method for forming trench isolation regions
SAMSUNG ELECTRONICS CO LTD2 citations60
US6858062B2Feb 22, 2005
Residual gas removing device and method thereof
SAMSUNG ELECTRONICS CO LTD3 citations59
US6730619B2May 4, 2004
Method of manufacturing insulating layer and semiconductor device including insulating layer
SAMSUNG ELECTRONICS CO LTD2 citations59
US7180129B2Feb 20, 2007
Semiconductor device including insulating layer
SAMSUNG ELECTRONICS CO LTD0 citations49