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Inventor
YONEYAMA RYOU
JP
2 patents
Patents
2 patents
US6680541B2
Jan 20, 2004
Semiconductor device and process for producing the same
HITACHI LTD
15 citations
91
US6358838B2
Mar 19, 2002
Semiconductor device and process for producing the same
HITACHI LTD
27 citations
91